Böhm, Stefan


 
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Böhm, Stefan
   
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Automation, since 1950
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thumbnail of29245009 Adhesive bonding of MEMS and MOEMS with support of substrate inherent functional structures, in: IWK - Internationales wissenschaftliches Kolloquium // Technische Universität Ilmenau; Tagungsband, 53. IWK - Internationales Wissenschaftliches Kolloquium
Author: Wagner, Mario; Böhm, Stefan; Dilger, Klaus
Published: 2008
 
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