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Michael, S.

 
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Michael, S.
   
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Automation, since 1950
Literature
 
thumbnail of29452009 Design of an interferometric test station for parallel inspection of MEMS, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Author: Schäffel, Christoph; Michael, S.; Paris, R.; Frank, A.; Zeike, N.; Gastinger, K.; Kujawinska, M.; Zeitner, U.; Beer, S.
Published: 2011
 
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