Proceedings of the 14th IFToMM World Congress, Tribology: Effect of Scratching Load on the Friction-induced Selective Etching of Si3N4 Film on Si(100) Surface

Allgemeine Angaben
Autor	Xiao, Chen; Chen, Lei; Guo, Jian; Yu, Bingjun; Qian, Linmao
Erschienen	Taipei, Taiwan, 2015
Ausgabe
Umfang
ISBN

Sammlungen

ab 2000

Übergeordnete Werke

Tribology, in: Proceedings of the 14th IFToMM World Congress
Autor: IFToMM - International Federation for the Promotion of Mechanism and Machine Science; Hirano, M.; Kim, S.; Feng, Kai; Li, Wenjun; Nguyen, Chi-Cuong; Jao, Hsiang-Chin; Li, Wang-Long; Kao, W. H.; Hsieh, Y. T.; Huang, Hua-Chih; Wei, Shih-Jie; Chen, Chih-Ming; Horng, Jeng-Haur; Chern, Shin-Yuh; Wei, Chin-Chung; Wu, Chien-Ju; Chang, Chin-Haur; Hoang, Trung-Thong; Yang, Yung-Hao; Zhang, P.; Lee, K. H.; [...]
Erschienen: 2015

Verknüpfte Datensätze

Dokumente:

Tribology

Permanentlinks

DMG-Lib