Efficient MEMS Characterization Technique for Spring-Mass-Damping Systems, in: 50. IWK - Internationales Wissenschaftliches Kolloquium

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Author	Dötzel, Wolfram; Shaporin, Alexey V.; Hanf, Marian
Published	Ilmenau, 2005
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50. IWK - Internationales Wissenschaftliches Kolloquium | 50. IWK - International Scientific Colloquium
Author: Sendler, Jan; Trutschel, Ralf; Augsburg, Klaus; Heimann, Stefan; Holstein, Peter; Franck, U.; Mackenzie, David; Andrei, Costică I.; Micu, Constantin; Kostrakiewicz, S.; Weiß, A.; Kurtz, Peter; Sievers, Gunnar; Schlütter, Beate; Schmauder, Martin; Höhn, Katrin; Krengel, Michael; Franke, Ingmar S.; Schlönhardt, Frank; Bartsch, Heinz; Padun, B. S.; Ilienkov, R. V.; Brecht, Rike; Brix, Torsten; [...]
Published: 2005

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50. IWK - Internationales Wissenschaftliches Kolloquium

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DMG-Lib		https://www.dmg-lib.org/dmglib/handler?docum=11805009
Europeana		http://www.europeana.eu/portal/record/2020801/dmglib_handler_docum_11805009.html

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Ilmenau TU

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2005

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Efficient MEMS Characterization Technique for Spring-Mass-Damping Systems, in: 50. IWK - Internationales Wissenschaftliches Kolloquium

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