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Neue Konzepte für mikrooptische Sensoren, in: 44. IWK - Internationales Wissenschaftliches Kolloquium
Author: Manske, Eberhard; Jäger, Gerd; Grünwald, Rainer
Published: 1999
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Metrologisches Rasterkraftmikroskop, in: 50. IWK - Internationales Wissenschaftliches Kolloquium
Author: Dorozhovets, Nataliya; Hausotte, Tino; Manske, Eberhard; Jäger, Gerd
Published: 2005
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Beitrag zur Entwicklung nanoskaliger Kalibriersysteme, in: 50. IWK - Internationales Wissenschaftliches Kolloquium
Author: Welter, Matthias; Manske, Eberhard; Jäger, Gerd
Published: 2005
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A framework for optical sensors utilizing I++DME on nano positioning and nano measuring machines, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Author: Sparrer, Erik; Machleidt, Torsten; Hausotte, Tino; Manske, Eberhard; Franke, Karl-Heinz
Published: 2011
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Novel fibre-coupled reference sensor for nanopositioning and nanomeasuring machines, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Author: Balzer, Felix G.; Gerhardt, Uwe; Hausotte, Tino; Manske, Eberhard; Jäger, Gerd
Published: 2011
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Challenges and Prospects of Nanopositioning and Nanomeasuring Technology, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Author: Manske, Eberhard; Jäger, Gerd; Hausotte, Tino; Füßl, Roland
Published: 2011
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Automated Setup for Non-Tactile High-Precision Measurements of Roundness and Cylindricity Using Two Laser Interferometers, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Author: Kühnel, Michael; Gerhardt, Uwe; Ullmann, Vinzenz; Manske, Eberhard
Published: 2011
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Area based optical 2.5D sensors of a Nanopositioning and Nanomeasuring Machine, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Author: Machleidt, Torsten; Sparrer, Erik; Manske, Eberhard; Kapusi, Daniel; Franke, Karl-Heinz
Published: 2011
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Approaching nanometre accuracy in large plane mirror’s profile deviation measurement, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Author: Müller, Andreas; Hofmann, Norbert; Manske, Eberhard
Published: 2011
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Homodyne interference signal demodulation for nanopositioning and nanomeasuring machines, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Author: Hausotte, Tino; Percle, Brandon; Gerhardt, Uwe; Dontsov, Denis; Manske, Eberhard; Jäger, Gerd
Published: 2011
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Displacement interferometry of various commercial heterodyne He-Ne-laser-systems with stability in the sub-nanometer regime, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Author: Köchert, Paul; Flügge, Jens; Weichert, C.; Köning, Rainer; Manske, Eberhard
Published: 2011
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Signal and Data Processing in High-Precision Measuring Machines – a Case Study of the Next-Generation NPMMs, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Author: Percle, Brandon; Klöckner, Johannes; Manske, Eberhard; Fengler, Wolfgang
Published: 2011
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Quasi monolithic integration of Silicon-MEMS with piezoelectric actuators for High Speed non-contact Atomic Force Microscopy, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Author: Guliyev, Elshad; Volland, B.E.; Sarov, Y.; Ivanov, Tzv.; Klugowski, M.; Rangelow, I.W.; Manske, Eberhard
Published: 2011
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