Proceedings of the 14th IFToMM World Congress, Tribology: Effect of Scratching Load on the Friction-induced Selective Etching of Si3N4 Film on Si(100) Surface

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Author	Xiao, Chen; Chen, Lei; Guo, Jian; Yu, Bingjun; Qian, Linmao
Published	Taipei, Taiwan, 2015
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Tribology, in: Proceedings of the 14th IFToMM World Congress
Author: IFToMM - International Federation for the Promotion of Mechanism and Machine Science; Hirano, M.; Kim, S.; Feng, Kai; Li, Wenjun; Nguyen, Chi-Cuong; Jao, Hsiang-Chin; Li, Wang-Long; Kao, W. H.; Hsieh, Y. T.; Huang, Hua-Chih; Wei, Shih-Jie; Chen, Chih-Ming; Horng, Jeng-Haur; Chern, Shin-Yuh; Wei, Chin-Chung; Wu, Chien-Ju; Chang, Chin-Haur; Hoang, Trung-Thong; Yang, Yung-Hao; Zhang, P.; Lee, K. H.; [...]
Published: 2015

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