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Novel fibre-coupled reference sensor for nanopositioning and nanomeasuring machines, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Autor: Balzer, Felix G.; Gerhardt, Uwe; Hausotte, Tino; Manske, Eberhard; Jäger, Gerd
Publicado: 2011
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Automated Setup for Non-Tactile High-Precision Measurements of Roundness and Cylindricity Using Two Laser Interferometers, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Autor: Kühnel, Michael; Gerhardt, Uwe; Ullmann, Vinzenz; Manske, Eberhard
Publicado: 2011
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Homodyne interference signal demodulation for nanopositioning and nanomeasuring machines, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Autor: Hausotte, Tino; Percle, Brandon; Gerhardt, Uwe; Dontsov, Denis; Manske, Eberhard; Jäger, Gerd
Publicado: 2011
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