Proceedings of the 14th IFToMM World Congress, Tribology: Effect of Scratching Load on the Friction-induced Selective Etching of Si3N4 Film on Si(100) Surface

Informations générales
Auteur	Xiao, Chen; Chen, Lei; Guo, Jian; Yu, Bingjun; Qian, Linmao
Publié	Taipei, Taiwan, 2015
Edition
Extension
ISBN

Collections

2000 et après

Superordinate work

Tribology, in: Proceedings of the 14th IFToMM World Congress
Auteur: IFToMM - International Federation for the Promotion of Mechanism and Machine Science; Hirano, M.; Kim, S.; Feng, Kai; Li, Wenjun; Nguyen, Chi-Cuong; Jao, Hsiang-Chin; Li, Wang-Long; Kao, W. H.; Hsieh, Y. T.; Huang, Hua-Chih; Wei, Shih-Jie; Chen, Chih-Ming; Horng, Jeng-Haur; Chern, Shin-Yuh; Wei, Chin-Chung; Wu, Chien-Ju; Chang, Chin-Haur; Hoang, Trung-Thong; Yang, Yung-Hao; Zhang, P.; Lee, K. H.; [...]
Publié: 2015

Linked items

Documents:

Tribology

Permanent links

DMG-Lib