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MIS Sensors for Gas Concentration Measurements and Reactivity Diagnostics of Thin Metallic Layers, in: 44. IWK - Internationales Wissenschaftliches Kolloquium
Autor: Litovchenko, V.G.; Efremov, A.A.; Gorbanyuk, T.I.; Schipanski, D.; Paris, R.
Publicat: 1999
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Design of an interferometric test station for parallel inspection of MEMS, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Autor: Schäffel, Christoph; Michael, S.; Paris, R.; Frank, A.; Zeike, N.; Gastinger, K.; Kujawinska, M.; Zeitner, U.; Beer, S.
Publicat: 2011
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