Klugowski, M.

 
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Klugowski, M.
   
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Automatisation, depuis 1950
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thumbnail of29516009 Quasi monolithic integration of Silicon-MEMS with piezoelectric actuators for High Speed non-contact Atomic Force Microscopy, in: 56. IWK - Internationales Wissenschaftliches Kolloquium
Autor: Guliyev, Elshad; Volland, B.E.; Sarov, Y.; Ivanov, Tzv.; Klugowski, M.; Rangelow, I.W.; Manske, Eberhard
Publicado: 2011
 
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