Mechanika, Mechanika Volumes 2008: 3-D modeling of nanostructures evolution in lateral etching processes

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Author	Navickas, Romualdas
Published	Kaunas University of Technology, Kaunas, 2008
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2000 and later

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Mechanika: Mechanika Volumes 2008
Author: Kačeniauskas, A.; Zilinskaite, Ausra; Ziliukas, Antanas; Bručas, D.; Giniotis, Vytautas; Giniotis, Vytautas; Petroškevičius, Petras; Skeivalas, Jonas; Daunys, Mykolas; Stulpinaitė, A.; Yilmaz, Necip Fazil; Eyercioglu, Omer; Zhurauski, M. A.; Dragašius, Egidijus; Korobko, E. V.; Novikova, Z. A.; Maknickas, A.; Kačianauskas, R.; Kutas, R.; Karabegović, I.; Husak, Ermin; Abdelbaki, N.; Bouali, E.; [...]
Published: 2008

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Mechanika Volumes 2008

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DMG-Lib		https://www.dmg-lib.org/dmglib/handler?docum=30365009
Europeana		http://www.europeana.eu/portal/record/2020801/dmglib_handler_docum_30365009.html

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Ilmenau TU

http://www.tu-ilmenau.de

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2008

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Mechanika, Mechanika Volumes 2008: 3-D modeling of nanostructures evolution in lateral etching processes

General information