Micro Electromechanical Systems (MEMS), in: Final program // Thirteenth World Congress in Mechanism and Machine Science

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Author	IFToMM - International Federation for the Promotion of Mechanism and Machine Science; Buchacz, Andrzej; Placzek, Marek; Calleja Arriaga, Wilfrido; Diaz Alonso, D.; Hidalga, J.; Linares, M.; Molina, J.; Quiñones-Novelo, F. J.; Reyes, C.; Rosales, P.; Torres-Jacome, A.; Zuñiga-Islas, C.; Wróbel, Andrzej
Published	2011
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Superordinate work

Final program // Thirteenth World Congress in Mechanism and Machine Science ; Universidad de Guanajuato, Guanajuato City, México, June 19 - 23, 2011
Author: IFToMM - International Federation for the Promotion of Mechanism and Machine Science; Chen, Hsin-Cheng; Lee, Hong-Wen; Tsai, Ming-June; Chio, Nayibe; Gonzalez Acuña, Hernan; Sanabria, Henry; Popescu, Paul; Popescu, Marcela; Baldisserri, Benedetta; Parenti-Castelli, Vincenzo; Danieli, Guido; Giuzio, Francesco; Inchingolo, Francesco; Donnici, Mario; Marrelli, Massimo; Perrelli, Michele; Nudo, Paola; [...]
Published: 2011

Parts

	Analysis of the mechatronic system with piezoelectric actuator based on the approximate method, in: Final program // Thirteenth World Congress in Mechanism and Machine Science, Micro Electromechanical Systems (MEMS) Author: Buchacz, Andrzej; Placzek, Marek Published: 2011
	Fabrication of PolySilicon Microstructures using the PolyMEMS INAOE Technology, in: Final program // Thirteenth World Congress in Mechanism and Machine Science, Micro Electromechanical Systems (MEMS) Author: Calleja Arriaga, Wilfrido; Diaz Alonso, D.; Hidalga, J.; Linares, M.; Molina, J.; Quiñones-Novelo, F. J.; Reyes, C.; Rosales, P.; Torres-Jacome, A.; Zuñiga-Islas, C. Published: 2011
	Analysis of one side fixed piezoelectric plate model, in: Final program // Thirteenth World Congress in Mechanism and Machine Science, Micro Electromechanical Systems (MEMS) Author: Wróbel, Andrzej Published: 2011